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全視場外差白光干涉測量技術

Full-field heterodyne white light interferometry

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摘要

為了解決傳統白光干涉測量技術中對線性位移機構的位移精度要求過高的問題, 本文提出了一種全視場外差白光干涉測量技術。該技術主要通過使用存在差頻的白光干涉信號作為光源來實現在大掃描步長和低掃描精度條件下相干峰位置的高精度檢測。本文首先建立了白光外差干涉的數學模型, 再根據數學模型提供的光強信號特性提出了整體系統設計方案, 然后對測量方案的可行性進行了實驗驗證。最后針對多種誤差對算法計算精度的影響進行了理論分析和數據對比。誤差分析的結果表明: 白光外差干涉測量技術提供更高的測量精度和更好的抗干擾性能, 有效地降低了傳統白光干涉測量對線性位移機構精度的嚴苛依賴, 為光學自由曲面檢測技術提供了更多的可選解決方案。

Abstract

In order to solve the problem that the displacement accuracy of linear displacement mechanism is toohigh in traditional white light interferometry, this paper proposes a full-field heterodyne white light interferometry. Thetechnology mainly uses the white light interference signal with difference frequency as the light source to realize thehigh-precision detection of the coherent peak position under the conditions of large push step and low push precision.In this paper, the mathematical model of white light heterodyne interference is established firstly, and then the overallsystem design scheme is proposed according to the light intensity signal characteristics provided by the mathemat-ical model. Then the feasibility of the measurement scheme is verified by experiments. At the end, theoretical anal-ysis and data comparison are carried out for the influence of various errors on the calculation accuracy of the algo-rithm. The results of error analysis show that the white-light heterodyne interferometry technology provides highermeasurement accuracy and better anti-interference performance, effectively reducing the strict dependence of tradi-tional white light interferometry on the accuracy of linear displacement mechanism, and is an optical free-form sur-face detection technology. More solutions are available.

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補充資料

中圖分類號:P164

DOI:10.12086/oee.2020.190617

所屬欄目:科研論文

基金項目:國家自然科學基金資助項目 (61605217)

收稿日期:2019-10-15

修改稿日期:2020-01-09

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作者單位    點擊查看

汝洪武:西安工業大學光電工程學院, 陜西西安 710021中國科學院光電技術研究院計算光學室重點實驗室, 北京 100094
吳玲玲:西安工業大學光電工程學院, 陜西西安 710021
張文喜:中國科學院光電技術研究院計算光學室重點實驗室, 北京 100094
李楊:中國科學院光電技術研究院計算光學室重點實驗室, 北京 100094

聯系人作者:汝洪武(ruhongwu_nic@163.com)

備注:汝洪武(1995-), 男, 碩士研究生, 主要從事白光干涉測量方面的研究。

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引用該論文

Ru Hongwu,Wu Lingling,Zhang Wenxi,Li Yang. Full-field heterodyne white light interferometry[J]. Opto-Electronic Engineering, 2020, 47(2): 190617

汝洪武,吳玲玲,張文喜,李楊. 全視場外差白光干涉測量技術[J]. 光電工程, 2020, 47(2): 190617

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