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基于計算全息的無衍射光莫爾條紋三自由度測量方法研究

3-DOF measurement method for non-diffracting Moiré fringes based on CGH

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摘要

針對工作臺運動誤差, 提出了一種基于計算全息的無衍射光莫爾條紋三自由度測量方法。通過液晶空間光調制器(SLM)生成無衍射光, 利用兩束無衍射光干涉生成莫爾條紋。設計了無衍射光莫爾條紋三自由度測量光路, 建立了三自由度運動誤差數學模型, 并用幾何分析法將三種運動誤差 (偏擺角、滾轉角和俯仰角 )進行分離。利用旋轉臺模擬不同大小的三自由度運動誤差, 帶有誤差信息的無衍射光和莫爾條紋圖案分別由 CCD1和 CCD2接收。實驗結果表明, 通過光斑中心偏移量計算出的實際運動誤差值接近理論值, 測量誤差不超過 0.0104°, 驗證了無衍射光莫爾條紋三自由度測量系統的可行性與正確性。

Abstract

Aiming at the motion errors of the linear stage, a measurement method for the determination of three-degree-of-freedom (3-DOF) error motions is proposed based on non-diffracting Moiré fringes produced by computer-generated holograms (CGHs). A liquid crystal spatial light modulator (SLM) is used to generate non-diffracting beams, and two non-diffracting beams form Moiré fringes. A 3-DOF measuring optical path of non-diffracting Moiré fringes is designed. Meanwhile, a 3-DOF mathematical model of motion errors is established, and three kinds of motion errors (yaw angle, roll angle and pitch angle) are separated by geometric analysis method. A rotary table is used to simulate the 3-DOF motion errors on different conditions. The NDB and non-diffracting Moiré fringe patterns are obtained by CCD1 and CCD2 respectively. Experimental results show that the motion errors calculated by the positions of the central points agree well with the theoretical value with the error less than 0.0104°, which can verify the feasibility and correctness of the 3-DOF measurement system for non-diffracting Moiré fringes.

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中圖分類號:TP391

DOI:10.12086/oee.2020.190331

所屬欄目:科研論文

基金項目:國家自然科學基金資助課題 (51575164, 51405143); 湖北省教育廳重點項目 (D20161406); 太陽能高效利用湖北協同創新中心基金項目 (HBSKFZD2014007)

收稿日期:2019-06-14

修改稿日期:2019-11-04

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作者單位    點擊查看

呂清花:太陽能高效利用湖北省協同創新中心, 湖北武漢 430068湖北工業大學理學院, 湖北武漢 430068
程壯:湖北工業大學機械工程學院現代制造質量工程湖北省重點實驗室, 湖北武漢 430068
翟中生:湖北工業大學機械工程學院現代制造質量工程湖北省重點實驗室, 湖北武漢 430068
王選擇:湖北工業大學機械工程學院現代制造質量工程湖北省重點實驗室, 湖北武漢 430068
崔甲臣:太陽能高效利用湖北省協同創新中心, 湖北武漢 430068湖北工業大學理學院, 湖北武漢 430068
呂輝:太陽能高效利用湖北省協同創新中心, 湖北武漢 430068湖北工業大學理學院, 湖北武漢 430068

聯系人作者:呂清花(linsa080@126.com)

備注:呂清花(1980-), 女, 副教授, 博士研究生, 主要從事光電子技術、光電檢測、光伏技術方面的研究。

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引用該論文

Lv Qinghua,Cheng Zhuang,Zhai Zhongsheng,Wang Xuanze,Cui Jiachen,Lv Hui. 3-DOF measurement method for non-diffracting Moiré fringes based on CGH[J]. Opto-Electronic Engineering, 2020, 47(2): 190331

呂清花,程壯,翟中生,王選擇,崔甲臣,呂輝. 基于計算全息的無衍射光莫爾條紋三自由度測量方法研究[J]. 光電工程, 2020, 47(2): 190331

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