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用于檢測激光棒的變傾角馬赫-曾德爾干涉儀

Variable-inclination Mach-Zehnder interferometer for testing laser robs

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摘要

為實現激光棒透射波前的測量, 改善一般泰曼型或斐索型干涉儀測量小口徑激光棒透射波前時的邊緣衍射效應, 研究了一種變傾角移相馬赫-曾德爾干涉儀。通過調整移相反射鏡的傾斜姿態, 改變入射到馬赫 -曾德爾干涉光路的光束傾角, 參考光束與測試光束的光程差隨之變化, 從而在相干光之間引入相移, 實現了相移干涉測量。利用該干涉儀測量一根口徑為 Ф6 mm、長度為 60 mm激光棒 (Nd:YAG)的透射波前, 測量結果的峰谷值(PV)為 0.391λ, 均方根值(RMS)為 0.056λ; 使用 ZYGO激光干涉儀測量同一根激光棒, 其透射波前的峰谷值(PV)為 0.370λ, 均方根值(RMS)為 0.064λ。對比結果表明該干涉儀能實現光學元件透射波前的高精度檢測, 測試結果的一致性驗證了該方案的可行性。該變傾角移相方法具有較高的移相精度和較大的移相范圍, 且該變傾角干涉系統中光束僅一次透過待測激光棒, 可有效抑制多光束干涉現象, 改善小口徑激光棒的邊緣衍射效應。

Abstract

In order to measure the transmission wavefront of laser rods and to improve the edge diffraction effect of small-aperture laser rods measured by Tayman or Fizeau interferometer, a variable-inclination Mach-Zehnder inter-ferometer was proposed. The incident angle was changed by adjusting the tilting attitude of the phase shifting ref-lector, then the optical path difference was changed that the phase shift was introduced to the coherent light and the phase shifting interferometry was realized. The transmission wavefront of a laser rod (Nd:YAG) with the diameter of 6 mm and the length of 60 mm was measured by this interferometer, the peak-valley (PV) and root mean square (RMS) of the wavefront were 0.391λ and 0.056λ. The same laser rod was measured by ZYGO GPI XP interferometer, the peak-valley (PV) and root mean square (RMS) were 0.370λ and 0.064λ. The comparison results show that the interferometer can achieve high-precision detection of transmission wavefront of laser robs. The variable-inclination Mach-Zehnder interferometer has high phase-shifting precision and wide phase-shifting range, and the beam in the system can pass through the laser rod only once, which can suppress the multi-beam interference and improve the edge diffraction effect of the small-aperture laser rods.

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補充資料

中圖分類號:O436

DOI:10.12086/oee.2020.190254

所屬欄目:科研論文

基金項目:國家自然科學基金資助項目 (U1731115)

收稿日期:2019-05-17

修改稿日期:2019-09-20

網絡出版日期:--

作者單位    點擊查看

孔璐:南京理工大學電子工程與光電技術學院, 江蘇南京 210094
陳磊:南京理工大學電子工程與光電技術學院, 江蘇南京 210094
丁煜:南京理工大學電子工程與光電技術學院, 江蘇南京 210094
吳志飛:南京理工大學電子工程與光電技術學院, 江蘇南京 210094
鄭東暉:南京理工大學電子工程與光電技術學院, 江蘇南京 210094
朱文華:南京理工大學電子工程與光電技術學院, 江蘇南京 210094

聯系人作者:孔璐(kwyjl8@163.com)

備注:孔璐(1996-), 女, 碩士研究生, 主要從事光干涉測量方面的研究。

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引用該論文

Kong Lu,Chen Lei,Ding Yu,Wu Zhifei,Zheng Donghui,Zhu Wenhua. Variable-inclination Mach-Zehnder interferometer for testing laser robs[J]. Opto-Electronic Engineering, 2020, 47(2): 190254

孔璐,陳磊,丁煜,吳志飛,鄭東暉,朱文華. 用于檢測激光棒的變傾角馬赫-曾德爾干涉儀[J]. 光電工程, 2020, 47(2): 190254

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